Micro-xrf Instrument Developed in Combination with Atomic Force Microscope
نویسندگان
چکیده
A new micro-XRF instrument was developed in combination with an atomic force microscope (AFM). A small pinhole of 5 or 10 μm was made on the AFM cantilever. The center of the micro X-ray beam generated by a polycapillary X-ray lens was passed through the pinhole. The present experiment demonstrated that the size of the original X-ray beam of 48 μm produced by the polycapillary lens was reduced to about 10 μm. This instrument enables both observation of the surface morphology by the AFM and elemental analysis by micro-XRF.
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